Office address:
Department of Electrical Engineering, College of Engineering,
University
of Kentucky, 453 F. Paul Anderson Tower, Lexington, KY 40506
Phone: (859)218-6550; Fax: (859)257-3092; E-mail:
zhichen@engr.uky.edu
Title:
Professor of Electrical Engineering,
University of Kentucky,
Lexington, KY
Education:
Ph.D. in Electrical Engineering, University of Illinois at
Urbana-Champaign,
Urbana, IL. August 1999
M.S. in Electrical Engineering, University of Electronic
Science and
Technology (China). May 1987
B.S. in Electrical Engineering, University of Electronic
Science
and Technology (China). July 1984
Research interests:
Nano-scale materials,
nano-scale device fabrication, photovoltaic devices, and sensors.
Professional Experience:
07/2009-Present Professor of Electrical Engineering,
University of Kentucky, Lexington, KY
04/2011-Present CEO/CTO and Co-Founder, Advanced
Semiconductor Processing Technology LLC (ASPT), Lexington, KY,
USA.
01/2017-Present Visiting Professor, University of
Electronic Science & Technology of China, Chengdu, Sichuan, China
(Visiting in summers)
08/2015-12/2016 Visiting Professor, University of
Electronic Science & Technology of China, Chengdu, Sichuan, China
(Part-time consulting in the academic years and visiting in summers,
approved by University of Kentucky)
08/2015-12/2016 Entrepreneurial Leave, Advanced
Semiconductor Processing Technology, LLC (ASPT), Lexington, KY.
(Fall 2015 and Fall 2016, approved by University of Kentucky)
05/2012-8/2015 Visiting Professor, University of
Electronic Science & Technology of China, Chengdu, Sichuan, China
(Summers in 2012, 2013, 2014, 2015, and sabbatical leaves in Fall 2013
and Fall 2014, approved by University of Kentucky)
07/2011-07/2013 Director of Graduate Studies,
Department of Electrical & Computer Engineering, University of
Kentucky, Lexington, KY
07/2009-07/2013 Kentucky Utilities Professor of
Electrical Engineering, University of Kentucky, Lexington, KY
07/2007-06/2009 Kentucky Utilities Associate
Professor of Electrical Engineering, University of Kentucky, Lexington,
KY
07/2004-06/2009 Associate Professor of Electrical
Engineering, University of Kentucky, Lexington, KY
07/2001-Present Associate Director of Center for
Nanoscale Science & Engineering, University of Kentucky, Lexington,
KY
07/1999-06/2004 Assistant Professor of Electrical
Engineering, University of Kentucky, Lexington, KY
05/1998-08/1998 Member of Technical Stuff, Bell
Laboratories, Lucent Technologies, Orlando, FL
01/1994-06/1999 Research Assistant, Department of
Electrical and Computer Engineering, University of Illinois at
Urbana-Champaign, Urbana, IL
01/1993-12/1993 Research and Teaching Assistant,
Department of Electrical Engineering, Southern Illinois University,
Carbondale, IL
05/1987-12/1992 Lecturer, University of Electronic
Science and Technology of China, Chengdu, Sichuan, China
Industrial Experience:
Investigated the interface trap generation in CMOS devices using
charge-pumping
test and hot carrier aging as member of technical stuff of Bell
Laboratories,
Lucent Technologies, Orlando, Florida (1998).
Awards:
National Science Foundation CAREER Award, 2001
National Award for Invention, Ministry of Science and
Technology, P.
R. China, 1995
The Second Prize Paper Award, Industrial Automation and
Control Committee,
the 27th Annual Conference, IEEE Industry Application Society, USA,
1992
Who's Who in America, 2001 - 2010
Senior Member, IEEE
Kentucky Utilities Professorship, University of Kentucky, 2007
Wethington
Award, University
of Kentucky, June
2005
1998-1999 Beckman Graduate Fellowship, University of Illinois
at Urbana-Champaign
Professional Achievements:
See the main page of this website
Professional Services:
Society office
positions:
05/2018-present Treasurer, Division of Dielectric
Science & Technology (DST), the Electrochemical Society (ECS)
05/2014-present Governing Body Member, Division of
Dielectric Science & Technology (DST), the Electrochemical Society
(ECS)
Editorial positions:
05/2003-present Member, Editorial Board of Sensor
Letters, American Scientific Publishers, Stevenson Ranch, CA
10/2014-present Member of Editorial Board of the
Electrochemical Society (ECS) Transactions
06/2016 Co-Editor of ECS Transaction for Symposium
D01: Dielectrics for Nanosystems 7: Materials Science, Processing,
Reliability, and Manufacturing, 229th Meeting of the Electrochemical
Society, Inc. San Diego, CA, May 29-June 3, 2016
05/2014 Co-Editor of ECS Transaction for Symposium N2
- Dielectrics for Nanosystems 6: Materials Science, Processing,
Reliability, and Manufacturing, the 225th Meeting of the
Electrochemical Society, Orlando, Florida, May 11-16, 2014
05/2012 Co-Editor of ECS Transactions for Symposium
of Nanosystems V: Materials Science, Processing, Reliability, and
Manufacturing, the 221th Meeting of the Electrochemical Society,
Seattle, Washington, May 6-11, 2012
04/2010 Co-editor, ECS Transactions, in Dielectrics
for nanosystem 4: Materials Science, Processing, Reliability, and
Manufacturing, vol. 28, issue 2, 2010
05/2009-05/2010 Co-editor of ECS Transactions for
Dielectrics for nanosystems IV (E2), 217th Meeting of the
Electrochemical Society, Vancouver, Canada, April 25-30, 2010
08/2004 Associate Editor, Medical Physics, the
American Association of Physicists in Medicine
03/2003 Associate Editor, Medical Physics, the
American Association of Physicists in Medicine
Conference Organization
02/2018 每 10/2019 Symposium Organizer for Symposium
I02 Photovoltaics for the 21st Century 15: New Materials and Processes,
236th ECS Meeting, Atlanta, Georgia, Oct. 13-17, 2019.
10/2018 每 05/2019 Symposium Organizer for Symposium
B07: Low-Cost Photovoltaics, 235th ECS Meeting, Dallas, Texas, May
26-30, 2019.
02/2018 每 10/2018 Symposium Organizer for Symposium
D02: Photovoltaics for the 21st Century 14, 234th ECS Meeting, Cancun,
Mexico, Sept 30 每 Oct 4, 2018
02/2017 每 10/2017 Symposium Organizer for Symposium
Z02: Nanotechnology General Session, 234th ECS Meeting, Cancun, Mexico,
Sept 30 每 Oct 4, 2018
08/2017 每 05/2018 Symposium Organizer for Symposium
Z02: Nanotechnology General Session, the 233rd ECS Meeting, Seattle,
WA, USA, May 13-17, 2018.
02/2017 每 10/2017 Symposium Organizer for Symposium
Z02: Nanotechnology General Session, the 232nd ECS Meeting, National
Harbor, Maryland, USA, October 1-6, 2017.
02/2017 每 10/2017 Symposium Organizer for Symposium
D02: Photovoltaics for the 21st Century 13, the 232nd ECS Meeting,
National Harbor, Maryland, USA, October 1-6, 2017.
08/2015 - 06/2016 Symposium Organizer for Symposium
D01: Dielectrics for Nanosystems 7: Materials Science, Processing,
Reliability, and Manufacturing, 229th Meeting of the
Electrochemical Society, Inc. San Diego, CA, May 29-June 3, 2016
08/2015 - 06/2016 Symposium Organizer for Symposium
Z02: Nanotechnology General Session featuring Nanoscale Luminescent
Materials, 229th Meeting of the Electrochemical Society, Inc. San
Diego, CA, May 29-June 3, 2016
08/2013 - 06/2014 Technical Program Committee Member,
2014 IEEE International Conference on Electron Devices and Solid-State
Circuits, Chengdu, Sichuan, China, June 18-20, 2014
09/01/13-05/15/14 Symposium Organizer for Symposium
N2 - Dielectrics for Nanosystems 6: Materials Science, Processing,
Reliability, and Manufacturing, the 225th Meeting of the
Electrochemical Society, Orlando, Florida, May 11-16, 2014
09/01/11-05/11/12 Symposium Organizer for Dielectrics
for Nanosystems V: Materials Science, Processing, Reliability, and
Manufacturing, the 221th Meeting of the Electrochemical Society,
Seattle, Washington, May 6-11, 2012
05/06-05/11, 2012 Session Chair for Dielectrics for
Nanosystems V: Materials Science, Processing, Reliability, and
Manufacturing, the 221th Meeting of the Electrochemical Society,
Seattle, Washington, May 6-11, 2012
07/01/09-04/30/10 Symposium Organizer for Dielectrics
for Nanosystems IV: Materials Science, Processing, Reliability, and
Manufacturing, the 217th Meeting of the Electrochemical Society,
Vancouver, Canada, April 25-30, 2010
04/25-04/30, 2010 Session Chair, Dielectrics for
nanosystems IV (E2), 217th Meeting of the Electrochemical Society,
Vancouver, Canada, April 25-30, 2010
05/2009-05/2010 Symposium organizer, Dielectrics for
nanosystems IV (E2), 217th Meeting of the Electrochemical Society,
Vancouver, Canada, April 25-30, 2010
07/10-07/13, 2009 Session Chair, The 2nd
International Multi-Conference on Engineering and Technological
Innovation: IMETI 2009, Orlando, Florida, USA
08/2009-07/2010 Technical Program Committee Member,
the 2010 IEEE UGIM (University Government Industry Micro/nano)
Symposium, June 28-July 1, 2010, West Lafayette, IN.
07/14-07/16, 2008 Session Chair, the 17th Biennial
IEEE University Government Industry Micro/nano Symposium, Louisville,
KY, USA
05/18-05/23, 2008 Session Chair at the International
Symposium on Dielectrics for Nanosystems III, 213th Meeting of
Electrochemical Society, Phoenix, AZ, May 18-23, 2008.
08/2007-07/2008 Technical Program Committee Member,
the 2008 IEEE UGIM (University Government Industry Micro/nano)
Symposium, Louisville, KY
05/27-05/30, 2001 Session Chair, The ECS
International Semiconductor Technology Conference, the Electrochemical
Society, USA, Shanghai, China
05/15-06/15, 2001 Short course: ※MOSFET Technology§,
at Lexmark International, Inc., Lexington, Kentucky, USA
Technical Review:
Proposal Review:
06/2011 Panelist , ※Nanoelectronics for 2020 and
Beyond,§ National Science Foundation, Arlington, Virginia
02/2011 Proposal reviewer, University Coal Research
program, US Department of Energy
08/2009 Panelist, SBIR program, National Science
Foundation, Arlington, Virginia
02/2008 Proposal reviewer, Division of Materials
Research, National Science Foundation, Arlington, Virginia
01/2007 Panelist, Regular program, National Science
Foundation, Arlington, Virginia
01/2007 Proposal reviewer, Division of Materials
Research, National Science Foundation, Arlington, Virginia
11/2006 Proposal reviewer, Swiss National Science
Foundation, Wildhainweg 3, P.O. Box 8232, CH-3001 Berne, Switzerland
03/2006 Proposal reviewer, Division of Materials
Research, National Science Foundation, Arlington, Virginia
06/2005 Proposal reviewer, University Coal Research
program, US Department of Energy
05/2005 Panelist, SBIR program, National Science
Foundation, Arlington, Virginia
12/2004 Proposal reviewer, US Civilian Research and
Development Foundation, Arlington, Virginia
06/2004 Proposal reviewer, US Civilian Research and
Development Foundation, Arlington, Virginia
03/2004 Proposal reviewer, CHE- Analytical and
Surface Chemistry, National Science Foundation, Arlington, Virginia
10/2003 Proposal Reviewer, US Civilian Research and
Development Foundation, Arlington, Virginia
06/2003 Proposal Reviewer, US Civilian Research and
Development Foundation, Arlington, Virginia
09/2003 Panelist, SBIR program, National Science
Foundation, Arlington, Virginia
09/2002 Proposal Reviewer, Moldovan-U.S. Bilateral
Grants Program, US Civilian Research and Development Foundation,
Arlington, Virginia
04/2002 Proposal reviewer, SBIR Phase II program, US
Department of Energy
10/2001 Proposal reviewer, US Civilian Research and
Development Foundation, Arlington, Virginia
05/2001 Proposal reviewer, SBIR Phase I program, US
Department of Energy
01/2001 Panelist, NIRT program, National Science
Foundation, Arlington, Virginia
Faculty Promotion Review
03/2014 Evaluation of a faculty member for promotion
from Associate Professor to Full Professor for Al-Balqa* Applied
University Amman, Jordan Amman, P.O.Box (15008), marka ashamalia.
12/2013 Evaluation of a faculty member for promotion
from Assistant Professor to Associate Professor for King Abdulaziz City
for Science and Technology Scientific Council P.O. Box 6086, Riyadh
11442, Kingdom of Saudi Arabia.
Paper Review:
Reviewed numerous papers for
Journal of Applied Physics
Applied Physics Letters
Medical Physics
IEEE Transactions on Electron Devices
IEEE Transactions on Devices and Materials Reliability
IEEE Sensor Journal
Journal of Electrochemical Society
Journal of Nanoscience and Nanotechnology
Sensors and Actuators
Sensor Letters
Solid State Electronics
Journal of Materials Science
Journal of Electronic Materials
Journal of Physics D
Journal of Physical Chemistry
Physica Status Solidi
Thin Solid Films
UNIVERSITY SERVICE
08/2019-02/2020 Search Committee for New Faculty,
Department of Electrical & Computer Engineering and Department of
Chemical & Materials Engineering, University of Kentucky
07/2011-07/2013 Director of Graduate Studies,
Department of Electrical & Computer Engineering, University of
Kentucky
07/2009-07/2013 Graduate Committee, Department of
Electrical & Computer Engineering, University of Kentucky
09/2008 Department Representative, International
Teaching Assistant (ITA) Screening Test, Graduate School, University of
Kentucky
07/2001-present Associate Director, Center for
Nanoscale Science and Engineering, College of Engineering, University
of Kentucky
07/2004-06/2006 Search Committee for New Faculty,
Department of Electrical & Computer Engineering, University of
Kentucky
07/2004-12/2006 Seminar Coordinator for Department of
Electrical & Computer Engineering and Center for Nanoscale Science
and Engineering, University of Kentucky
03/2004-12/2004 Ad Hoc Committee for Use of Current
Technology, Department of Electrical & Computer Engineering,
University of Kentucky
03/2001 Review for Undergraduate Scholarship in
Electrical Engineering, University of Kentucky
03/2000 Review for Undergraduate Scholarship in
Electrical Engineering, University of Kentucky
EDUCATION OUTREACH
Seminars for high school students, "Computer Chips: A World of
Microelectronics," in North Laurel High School, London, KY, May 22,
2009.
Seminars for high school students, "Computer Chips: A World of
Microelectronics," in Rogers Scholars Program, Center for Rural
Development, Somerset, KY, July 15 and July 22, 2000 and July 17, 2001,
July 24, 2001, July 12, 2007.
Education outreach for 3rd-5th grade students in Deep Spring Elementary
School and J. R. Ewan Elementary School at Lexington, KY, April 2001.
Lab sessions for high school students, Assembling Humidity Controller
Circuits, Lie Detector Circuits, and Oscillating Circuits, in Rogers
Scholars Program, Center for Rural Development, Somerset, KY, twice
each Summer, 2002-2008
COMMUNITY SERVICES:
05/2013-05/2014 President, Kentucky Chinese American
Association, Lexington, KY
05/2012-05/2014 Board of Director, Kentucky Chinese
American Association, Lexington, KY
05/2010-05/2012 Membership Officer, Kentucky Chinese
American Association, Lexington, KY
TECHNOLOGY
COMMERCIALIZATION:
12/2019 ASPT LLC, USA achieved volume production of dew point
transmitters by 2000 units per year
12/2014 ASPT LLC, Lexington, KY, USA, received $1,000,000 private
investment to scale up manufacturing of dew point transmitters.
08/2014 Developed a prototype dew point meter to measure trace moisture
levels down to 0.5 ppmv (-80C dew point). The hybrid dielectric
moisture sensors exhibit remarkable stability, fast response, and high
sensitivity.
12/2012 Invented a new moisture sensor based on the alpha-Al2O3/SiO2
hybrid dielectric material (US Patent 8,739,623, US Patent 9,285,334,
and Chinese Invention Patent 201410246545).
04/2011 Co-founded a company, Advanced Semiconductor Processing
Technology LLC (ASPT USA), to commercialization of my university
research results. ASPT USA is also responsible for research and
development, manufacturing of sensor chips, and calibration and
assembly of sensor meters.
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INVITED
PRESENTATION at INTERNATIONAL CONFERENCES
1. Hojjat Sarvari, Mohsen Nasseri, So Min Park,
Poorya Kamali, Douglas R. Strachan, Kenneth Graham, Vijay P. Singh, and
Zhi David Chen, ※The Key Processing Issues and Their Solutions for
High-Quality Perovskite Solar Cells§ 236th ECS Meeting, Atlanta,
Georgia, Oct. 13-17, 2019. (Invited)
2. Long Ji, Peng Zhang, Yafei Wang, Detao Liu, Shibin
Li, and Zhi David Chen, ※High efficiency and low hysteresis solar cells
based on perovskite with triple cation and mixed Pb-Sn,§ 234th ECS
Meeting, Cancun, Mexico, Sept 30 每 Oct 4, 2018 (Invited Talk)
3. Peng Zhang, Yafei Wang, Detao Liu, Shibin Li, and
Zhi David Chen, "Improvement of Perovskite Films and the Perovskie/TiO2
Interface", the 232nd ECS Meeting, National Harbor, Maryland, USA,
October 1-6, 2017. (Invited)
4. Shibin Li, Detao Liu, Peng Zhang, Yafei Wang,
Hojjatollah Sarvari, Yaoyu Xuan, Zhi David Chen, "The Defects of ZnO
Nanorods Passivated By Ultra-Thin Al2O3 Film for Solar Cell
Applications", the 229th Meeting of the Electrochemical Society, San
Diego, CA, May 29-June 3, 2016. (Invited)
5. Shibin Li, Xiaohui Yang, Xiongbang Wei, Yaoyu
Xuan, Yadong Jiang, Zhi Chen, "Fabrication of high-quality TiO2
nanotubes on conductive glasses", the 227th ECS Meeting, Chicago, IL,
May 24-28, 2015. (Invited)
6. L. Han and Z. Chen, ※Atomic Layer Deposition of
HfO2 Using HF Etched Thermal and RTP SiO2 as Interfacial Layers§, 225th
ECS Meeting, Orlando, FL, May 11-16, 2014. (Invited)
7. L. Han and Z. Chen, ※Ultrathin SiO2 Films Grown by
Atomic Layer Deposition Using Tris(dimethylamino)silane (TDMAS) and
Ozone§, 224th ECS Meeting, San Francisco, CAㄛ Oct 27 - Nov 1, 2013.
(Invited)
8. Zhi Chen, ※Origin of Tunneling Current Reduction
and Phonon-Energy Coupling Enhancement in the SiO2/Si System,§ The 12th
International Union of Materials Research Societies (IUMRS) Conference
in Asia, Taipei, Taiwan, Sept. 19-22, 2011. (Invited)
9. Jun Fang, Youngsik Song and Zhi Chen, ※SU-8
Nanopillars and Hierarchically Branched Nanowires Fabricated Using
Anodic Aluminum Oxide Templates,§ Nanoscale Low-Dimensional
Electronic and Photonic Devices, the 218th Meeting of The
Electrochemical Society, Las Vegas, Nevada, October 10-15, 2010.
(Invited)
10. Shibin Li and Zhi Chen, ※Effect of the chemical
oxide layer thickness on the interfacial quality of ALD-grown HfO2 on
silicon,§ at the International Symposium on Dielectrics for Nanosystems
III, the 217th Meeting of The Electrochemical Society, Vancouver,
Canada, April 25-30, 2010. (Invited)
11. Zhi Chen, ※A New Physics Effect,
Phonon-Energy-Coupling Enhancement, and Its Applications for Leakage
Current Reduction of Gate Dielectrics,§ at the International Symposium
on Dielectrics for Nanosystems III, the 213th Meeting of
Electrochemical Society, Phoenix, AZ, May 18-23, 2008. (Invited)
12. Zhi Chen, ※Fundamental Mechanisms for Reduction
of Leakage Current of Silicon Oxide and Oxynitride through RTP-Induced
Phonon-Energy Coupling,§ 14th Annual IEEE International Conference on
Advanced Thermal Processing of Semiconductors - RTP2006, Kyoto, Japan,
October 10-13, 2006. (Invited)
INVITED TALKS/SEMINARS
1. " Nanoscale Dielectric Materials and
Low-Cost Solar Cells" US DOE National Renewable Energy Laboratory, Jan.
8, 2016
2. ※Computer Chip Technology and Micro/Nano-Scale
Materials and Devices§, University of Electronic Science &
Technology of China, Chengdu, China, Sept. 29, 2014
3. ※Ultrathin SiO2 and HfO2 Films Grown by Atomic
Layer Deposition§, Institute of Microelectronics, Chinese Academy of
Science, Beijing, China, Nov 16, 2013
4. ※The Past and Future of Computer Chips: From
Micro- to Nano-Scale Technology§, University of Electronic Science
& Technology of China, Chengdu, China, June 6, 2013
5. ※Nanoscale Structure and Material Research for MOS
Transistors, Molecular and Photovoltaic Devices,§ University of
Electronic Science & Technology of China, Chengdu, China, July 6,
2011
6. ※Enhancement of Phonon-Energy Coupling: Dramatic
Reduction of Gate Leakage Current of MOS Devices,§ Shanghai Jiaotung
University, Shanghai, China, June 13, 2007.
7. ※Enhancement of Phonon-Energy Coupling: Dramatic
Reduction of Gate Leakage Current of MOS Devices,§ University of
Electronic Science & Technology, Chengdu, Sichuan, China, June 29,
2006.
8. ※Enhancement of Phonon-Energy Coupling: Dramatic
Reduction of Gate Leakage Current of MOS Devices,§ Texas Instrument and
University of Texas at Dallas, May 21, 2006.
9. ※Enhancement of Phonon-Energy Coupling: Dramatic
Reduction of Gate Leakage Current of MOS Devices,§ Northwestern
University, Evanston, IL, May 2006.
10. ※Enhancement of Phonon-Energy Coupling: Dramatic
Reduction of Gate Leakage Current of MOS Devices,§ Purdue University,
April 2006.
11. ※Electronic Device Research: From Submicron to
Nano-Scale,§ Army Research Laboratory, Adelphi, Maryland, August, 2002.
12. ※The Surface and Interface of Semiconductors and
Carbon Nanotube Based Nanotechnology,§ University of Electronic Science
& Technology, Chengdu, Sichuan, China, May, 2002.
13. ※Porous nanostructures and carbon nanotubes for
chemical and biomedical applications,§ University of Illinois at
Chicago, Chicago, Illinois, August, 2001.
14. ※GaAs-based metal-insulator-semiconductor (MIS)
structures and deuterium-processed Si MOS transistors§, Lucent
Technology Bell Labs, Breinigsville, PA, Nov. 2000.
15. ※Physical and electrical properties of MOS
transistors processed in deuterium and hydrogen,§ University of Central
Florida, Orlando, FL, Feb. 1999.
16. ※Electrical properties of Si MOS devices
processed in deuterium and hydrogen,§ IBM Semiconductor Research and
Development Center, Essex Junction, VT, May, 1999.
17. ※Deuterium processing for MOS transistors:
Reliability improvement and degradation mechanism,§ University of
Louisville, Louisville, KY, Oct. 1999.
List of Publications: (See
the Pubilcation
Bar)
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