Capabilities of CMMED
Processing Capabilities
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Chemical treatment (Cleaning, etching, functionalization) |
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Spin-coating |
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Photolithography |
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Film deposition (physical and chemical processes) |
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Metrology (film thickness, four- point resistance, optical microscope) |
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Plasma oxidation and ion milling |
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Oxidation |
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Diffusion |
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Annealing |
Device Capabilities
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p-n Junctions |
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Metal oxide semiconductor (MOS) |
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Schottky diodes |
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Metal oxide semiconductor field rffect transistors (MOSFET) |
with 5 micron gate length
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Patterned device with minimum 3 micron line-width |
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Resistors |
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MEMs Structures |
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Multilayered Sensors |