Login to view details and place reservations

 

Week
05/04/2008 - 05/10/2008

View schedule:

April 2008
SMTWTFS
  12345
6789101112
13141516171819
20212223242526
27282930   
May 2008
SMTWTFS
    123
45678910
11121314151617
18192021222324
25262728293031
June 2008
SMTWTFS
1234567
891011121314
15161718192021
22232425262728
2930     
Sunday,
05/04/2008
12:00am1:00am2:00am3:00am4:00am5:00am6:00am7:00am8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm7:00pm8:00pm9:00pm10:00pm11:00pm
                                                
Annealing Furnace                                                
Atomic Force Microscope 1                                                
Atomic Force Microscope 2 (With isolation chamber)                                                
Atomic Layer Deposition                                                
Cleanbench - Acid (rm 365)                                                
Cleanbench - Solvent (rm 361)                                                
Doping Furnace                                                
E-beam Evaporator
 
  
 
 
 
EBL software key                                                
Electron Bean Lithography                                                
General Furnace                                                
Misc Charges                                                
Oxidation Furnace                                                
Photolithography                                                
Plasma Enhanced Chemical Vapor Deposition (PECVD)                                                
Plasma Etch                                                
Quartz Micro Balance (QMB)                                                
Rapid Thermal Processing (RTP)                                                
Reactive Ion Etching (RIE)                                                
SE Software Key                                                
Spectroscopic Ellipsometer                                                
Sputtering                                                
Sputtering 2 (multi target)                                                
Thermal Evaporator (Edwards)                                                
Thermal Evaporator 2 (Bell Jar)                                                

 

Monday,
05/05/2008
12:00am1:00am2:00am3:00am4:00am5:00am6:00am7:00am8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm7:00pm8:00pm9:00pm10:00pm11:00pm
                                                
Annealing Furnace                          
 
     
 
    
Atomic Force Microscope 1            
 
                        
Atomic Force Microscope 2 (With isolation chamber)            
 
                        
Atomic Layer Deposition                                                
Cleanbench - Acid (rm 365)                                                
Cleanbench - Solvent (rm 361)                                                
Doping Furnace                                                
E-beam Evaporator
 
 
 
 
EBL software key                    
 
                          
Electron Bean Lithography            
 
 
 
            
General Furnace                                                
Misc Charges                                                
Oxidation Furnace                                                
Photolithography                             
 
               
Plasma Enhanced Chemical Vapor Deposition (PECVD)                                                
Plasma Etch                                                
Quartz Micro Balance (QMB)            
 
                        
Rapid Thermal Processing (RTP)                                                
Reactive Ion Etching (RIE)                                 
 
            
SE Software Key                                                
Spectroscopic Ellipsometer                     
 
    
 
                  
Sputtering                                                
Sputtering 2 (multi target)                    
 
                        
Thermal Evaporator (Edwards)                                                
Thermal Evaporator 2 (Bell Jar)                                                

 

Tuesday,
05/06/2008
12:00am1:00am2:00am3:00am4:00am5:00am6:00am7:00am8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm7:00pm8:00pm9:00pm10:00pm11:00pm
                                                
Annealing Furnace                                                
Atomic Force Microscope 1                    
 
 
 
             
Atomic Force Microscope 2 (With isolation chamber)                                                
Atomic Layer Deposition                                                
Cleanbench - Acid (rm 365)                                                
Cleanbench - Solvent (rm 361)                    
 
            
Doping Furnace                                                
E-beam Evaporator
 
 
 
 
 
EBL software key                                                
Electron Bean Lithography                     
 
                
General Furnace                                                
Misc Charges                                                
Oxidation Furnace                                                
Photolithography                    
 
 
 
             
Plasma Enhanced Chemical Vapor Deposition (PECVD)                                                
Plasma Etch                                 
 
             
Quartz Micro Balance (QMB)                              
 
            
Rapid Thermal Processing (RTP)                                                
Reactive Ion Etching (RIE)                            
 
                 
SE Software Key                                                
Spectroscopic Ellipsometer                                                
Sputtering                                                
Sputtering 2 (multi target)                                                
Thermal Evaporator (Edwards)                                                
Thermal Evaporator 2 (Bell Jar)                     
 
                       

 

Wednesday,
05/07/2008
12:00am1:00am2:00am3:00am4:00am5:00am6:00am7:00am8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm7:00pm8:00pm9:00pm10:00pm11:00pm
                                                
Annealing Furnace                                                
Atomic Force Microscope 1                    
 
                    
Atomic Force Microscope 2 (With isolation chamber)                                                
Atomic Layer Deposition                                                
Cleanbench - Acid (rm 365)                                                
Cleanbench - Solvent (rm 361)                                                
Doping Furnace                                                
E-beam Evaporator
 
 
 
 
EBL software key                                                
Electron Bean Lithography              
 
 
            
General Furnace                                                
Misc Charges                                                
Oxidation Furnace                                                
Photolithography                   
 
 
                        
Plasma Enhanced Chemical Vapor Deposition (PECVD)                                                
Plasma Etch                           
 
                
Quartz Micro Balance (QMB)                              
 
    
Rapid Thermal Processing (RTP)                                                
Reactive Ion Etching (RIE)                           
 
                  
SE Software Key                                                
Spectroscopic Ellipsometer                                                
Sputtering                                                
Sputtering 2 (multi target)                                                
Thermal Evaporator (Edwards)                                                
Thermal Evaporator 2 (Bell Jar)                                                

 

Thursday,
05/08/2008
12:00am1:00am2:00am3:00am4:00am5:00am6:00am7:00am8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm7:00pm8:00pm9:00pm10:00pm11:00pm
                                                
Annealing Furnace                                                
Atomic Force Microscope 1                                                
Atomic Force Microscope 2 (With isolation chamber)                                                
Atomic Layer Deposition                                                
Cleanbench - Acid (rm 365)                                                
Cleanbench - Solvent (rm 361)                                                
Doping Furnace                                                
E-beam Evaporator
 
    
 
 
EBL software key                                                
Electron Bean Lithography              
 
 
            
General Furnace                                                
Misc Charges                                                
Oxidation Furnace                                                
Photolithography                    
 
    
 
 
              
Plasma Enhanced Chemical Vapor Deposition (PECVD)                                                
Plasma Etch                                                
Quartz Micro Balance (QMB)                                                
Rapid Thermal Processing (RTP)                                                
Reactive Ion Etching (RIE)