Small Sputtering System Request Form

 

 

Name    
Advisor    
Date and Time    
  You must also reserve on the calendar here or your request will not be approved.    
       
Material      
Target If other please specify
Thickness (nm)    
       
Gases      
Gas 1 If other please specify
Flow Rate (sccm) 25max    
       
Gas 2 If other please specify
Flow Rate (sccm) 25max    
       
Power      
RF power (watts) 400max    
       
General      
Notes    
       

This system is designed to be flexible. You may provide your own targets for specific depositions but they are contigent on CeNSE approval. Target size is 2"x.125". We can bond the sample for a fraction of the cost available comercially. Talk to Brian for details.

Small sputtering operation instructions Doc PDF