Equipment Information and Request Forms
Tool status:
= Up
= Limited (talk to Brian or Chuck)
= Down
You can check the equipment availability here
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Annealing Furnace Operation Proceedure Note: May need to borrow temp controller from Oxidation furnace. |
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Atomic Force Microscope Operation Proceedure On loan. Please select AFM w/isolation chamber |
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Atomic Force Microscope with Isolation Chamber Operation Proceedure
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Atomic Layer Deposition Operation Proceedure Al and Hf precusors only. |
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Calculation Stations
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Cleanbench - Solvent (rm 369) Operation Proceedure |
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Cleanbench - Acid (rm 365) Operation Proceedure
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Cold Probe Operation Proceedure Note: Can be used at room temperature. Yes I know. That makes it just a probe system. |
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CV plotter Operation Proceedure Note: Working. Need to find place to install it. |
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Dicing Saw Reservation form Operation Proceedure
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Doping Furnace Operation Proceedure Note: tube repair. |
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E-Beam Evaporator
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Electron Beam Lithography Operation Proceedure SEM imaging only |
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Film Thickness Monitor - Leaving Soon!
Reservation form Operation Proceedure
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General Furnace
Operation Proceedure Note: Tube is back in. |
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Inert gas oven Operation Proceedure .
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Mask Aligner Information Operation Proceedure
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Oxidation Furnace Operation Proceedure Note: May need to borrow temp controller from annealing furnace |
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Plasma Enhanced Chemical Vapor Deposition (PECVD)
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Plasma Etch (Microwave Induced) Operation Proceedure |
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Quartz Crystal Microbalance with Dissapation (QCM-D) |
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Rapid Thermal Processing (RTP) Operation Proceedure
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Reactive Ion Etching (RIE) Operation Proceedure
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Spectroscopic Ellipsometer Operation Proceedure |
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Spin Coater Information
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Sputtering System (Small) Au sputter depositions must be made with a Center staff member. Please contact Bonnie (ms.bonnilu@gmail.com) or Matt (Matt.Deye@uky.edu) to make an appointment. Their calendar is published here. |
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Thermal Evaporator (Edwards) Conversion to turbo pumped unit.
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Thermal Evaporator 2 (Bell Jar) NOTE: Do not open the high vac valve unless it reads 5x10-1 torr or better. Please continue to use the backing line at 2x10-2 or better as before. |
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Equipment Maintenance Request or Issue Reporting |
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