Equipment Information and Request Forms

 

 

Tool status:

= Up

= Limited (talk to Brian or Chuck)

= Down

 

You can check the equipment availability here

Annealing Furnace

Information

Reservation form

Operation Proceedure

Note: May need to borrow temp controller from Oxidation furnace.

Atomic Force Microscope

Information

Reservation form

Operation Proceedure

Note: Currently set up for Plasmon research. Please use the other AFM.

Atomic Force Microscope with Isolation Chamber

Information

Reservation form

Operation Proceedure

AFM User Download

Atomic Layer Deposition

Information

Reservation form

Operation Proceedure

Cleanbench - Solvent (rm 369)

Information

Reservation form

Operation Proceedure

Cleanbench - Acid (rm 365)

Information

Reservation form

Operation Proceedure

Cold Probe

Information

Reservation form

Operation Proceedure

CV plotter

Information

Reservation form

Operation Proceedure

Note: Working. Need to find place to install it.

Dicing Saw

Information

Reservation form

Operation Proceedure

Note: Thin blade is broken but usable.

Doping Furnace

Information

Reservation form

Operation Proceedure

Note: Being used as the General furnace. Est repair 8/15/09

E-Beam Evaporator

Information

Reservation form

Operation Proceedure

 

Electron Beam Lithography

Information

Reservation form

Operation Proceedure

EBL User Download

Film Thickness Monitor - Coming Soon!

Information

Reservation form

Operation Proceedure

 

General Furnace

Information

Reservation form

Operation Proceedure

Note: The General furnace tube is in the Doping Furnace.

Inert gas oven

Information

Reservation form

Operation Proceedure

Note: No gasses at this time.

 

Mask Aligner

Information

Reservation form

Operation Proceedure

 

Oxidation Furnace

Information

Reservation form

Operation Proceedure

Note: May need to borrow temp controller from annealing furnace

Plasma Enhanced Chemical Vapor Deposition (PECVD)

Information

Reservation form

Operation Proceedure

 

Plasma Etch

Information

Reservation form

Operation Proceedure

Quartz Crystal Microbalance with Dissapation (QCM-D)

Information

Reservation form

Operation Proceedure

Rapid Thermal Processing (RTP)

Information

Reservation form

Operation Proceedure

Reactive Ion Etching (RIE)

Information

Reservation form

Operation Proceedure

Spectroscopic Ellipsometer

Information

Reservation form

Operation Proceedure

Spin Coater

Information

Reservation form

Operation Proceedure

Sputtering System (Small)

Information

Reservation form

Operation Proceedure

Est. Repair date 12/4/09

Sputtering System (Large)

Information

Reservation form

Operation Proceedure

 

Thermal Evaporator (Edwards)

Information

Reservation form

Operation Proceedure

est. repair date 12/15/09

Thermal Evaporator 2 (Bell Jar)

Information

Reservation form

Operation Proceedure

 

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