Equipment Information and Request Forms

 

 

Tool status:

= Up

= Limited (talk to Brian)

= Down

= Is being installed or decomissioned (talk to Brian)

 

You can check the equipment availability here

Annealing Furnace

Information

Operation Proceedure

Note: May need to borrow temp controller from Oxidation furnace.

Atomic Force Microscope

Information

Operation Proceedure

AFM User Download

 

Atomic Force Microscope with Isolation Chamber

Information

 

Operation Proceedure

AFM User Download

Atomic Layer Deposition

Information

Works but vac gauge is not accurate.

 

Calculation Stations

Station 1 (Rm 45)

Station 2 (Rm 20b)

 

Cleanbench - Solvent (rm 369)

Information

Operation Proceedure

 

Cleanbench - Acid (rm 365)

Information

 

Operation Proceedure

 

Cold Probe

Information

 

Operation Proceedure

Note: Can be used to about 100 degrees Kelvin. Contact Brian.

Dicing Saw

Information

 

Operation Proceedure

E-Beam Evaporator

Information

 

Operation Proceedure

Contact Brian or Jacob to borrow pump

Electron Beam Lithography

Information

 

Operation Proceedure

EBL User Download

EBL Software Download

Environmental Scanning Electron Microscopy (ESEM) with Engery Dispersive Spectroscopy (EDS/EDX)

Information

 

Operation Proceedure

Note: Contact Brian for use.

 

General Furnace

Information

 

Operation Proceedure

Note: Tube is back in.

High Temp Furnace

Information

 

Operation Proceedure

Please contact Brian for use.

 

Inert gas oven

Information

 

Operation Proceedure

Mask Aligner

Information

 

Operation Proceedure

.

 

Oxidation Furnace

Information

 

Operation Proceedure

Note: May need to borrow temp controller from annealing furnace

 

Plasma Enhanced Chemical Vapor Deposition (PECVD)

Information

 

Operation Proceedure

Plasma Etch (Microwave Induced)

Information

Reservation form

Operation Proceedure

 

Probe station and Electronics Rack

Information

Reservation form

Operation Proceedure

Note: Contact Brian for use.

Quartz Crystal Microbalance with Dissapation (QCM-D)

Information

Reservation form

Operation Proceedure

QCM User Download

Rapid Thermal Processing (RTP)

Information

Reservation form

Operation Proceedure

 

Reactive Ion Etching (RIE)

Information

Reservation form

Operation Proceedure

 

Spectroscopic Ellipsometer

Information

Reservation form

Operation Proceedure

 
 
 

Spin Coater

Information

Reservation form

Operation Proceedure

 

 

Sputtering System (Small)

Information

Reservation form

Operation Proceedure

Au sputter depositions must be made with a Center staff member. Please contact student technicians. Their calendar is published here.

Gun Assignments

 

Thermal Evaporator (Edwards)

Information

Reservation form

Operation Proceedure

Conversion to turbo pumped unit.

 

Thermal Evaporator 2 (Bell Jar)

Information

Reservation form

Operation Proceedure

Needs Ion Gauge. 

   

Equipment Maintenance Request or Issue Reporting

Questions, Training, or Technical Assistance

Feedback

 

 

.