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The Prometrix FT-650 Film Thickness Probe uses the CARIS technique (Constant Angle Reflection Spectroscopy) to accurately and quickly measure thin films. This technique uses a white light source to illuminate the sample and measures the reflected light intensity over the range of 400nm - 800nm. The incident light and reflected light combine with resulting constructive/ destructive interference, producing maxima/minima values in the spectrum. The intensity versus wavelength values are then used to calculate film thickness.

Films Thickness Determination

Interferometric techniques can be divided into two general categories. In the
most commonly used technique the radiation is reflected from the sample
films in a spectrophotometer with fringes being formed as a function of
wavelength. This technique has been named CARIS (constant-angle
reflection interference spectroscopy) by Reizman and Van Gelder. In the
other technique, interference fringes are formed by varying the angle of
observation, and it is therefore called VAMFO (variable-angle
monochromatic fringe observation). In both techniques, the films thickness
can be given approximately as follows :.