Capabilities

The process of engineering and fabricating structures 1-100 nanometers in size, which defines "nanoscale,"is not straightforward. Understanding the science of nanoscale world is very important; yet, using these fundamental principles to engineer "bottom-up" processes in nanoscale world is equally challenging. Cutting-edge research facilities to carry out "top-down" and "bottom-up" nanofabrication include the following capabilities currently operational:

Equipment and Instrument Information

Atomic Force Microscopes (AFM) Atomic Layer Deposition (ALD) Calculation Station
Clean Room Clean Bench (Solvent) Clean Bench (Acid)
Electron Beam Evaporator Electron Beam Lithography Furnaces
Plasma Etching Plasma Sputtering Quartz Crystal Microbalance with Dissipation (QCM-D)
Rapid Thermal Processing (RTP) Reactive Ion Etching (RIE) Spectroscopic Ellipsometer
Thermal Evaporator    Plasma Enhanced Chemical Vapor Deposition (PE-CVD) Phtotolithography
   
Room Cameras (password protected) To request a password contact Brian (Staff and Faculty only)