Atomic Layer Deposition (ALD) Request Form

 

 

Name      
Advisor      
Date and time      
  You must also reserve on the calendar here or your request will not be approved.      
         
Material Info        
Material to be deposited If other please list  
Precusror If other please list  
Deposition Thickness If other please list  
         
Temp Info (Celius)        
Tank      
Valve Block      
Upper Chamber      
Lower Chamber      
Exhaust      
Vacuum Pump Tube      
         
Recipe Info        
Valve      
Pulse(s)
Expo(s)
Pump(s)
Cycle      
Flow (sccm)      
Delay (min)      
         
Other        
Notes