Hastings' Research Group:
Integrated Nanoscale Engineering

Prof. Jeffrey Todd Hastings
Dept. of Electrical and Computer Enginnering
Center for Nanoscale Science and Engineering

Journal Articles:

C. B. Samantary and J.T. Hastings, “Amino-propyl-triethoxy-silane on aluminum fiducial grids for spatial-phase-locked electron-beam lithography,” Journal of Vacuum Science & Technology B Vol. 27, pp. 2558-2562. Full Text.

E. U. Donev and J. T. Hastings, "Liquid-precursor electron-beam-induced deposition of Pt nanostructures: dose, proximity, resolution," Nanotechnology, vol. 20, p. 505302, 2009. Full Text.

E. U. Donev and J. T. Hastings, "Electron-Beam-Induced Deposition of Platinum from a Liquid Precursor," Nano Letters, vol. 9, pp. 2715-2718, 2009. Full Text.

V. Karre, P. D. Keathley, G. Jing, and J. T. Hastings, "Direct Electron-Beam Patterning of Teflon AF," Nanotechnology, IEEE Transactions on, vol. 8, pp. 139-141, 2009. Full Text.

H. Srinivasan, B. Bommalakunta, A. Chamberlain, and J. T. Hastings, "Finite Element Analysis and Experimental Verification of SOI Waveguide Bending Loss," Microwave and Optical Technology Letters, vol. 51, pp. 699-702, Mar 2009.
Full Text.

J. Sun, C. W. Holzwarth, M. Dahlem, J. T. Hastings, and H. I. Smith, "Accurate frequency alignment in fabrication of high-order microring-resonator filters," Optics Express, vol. 16, pp. 15958-15963, Sep 2008. Full Text.

Y. G. Yang and J. T. Hastings, "Field-programmable gate array implementation of real-time spatial-phase locking for electron-beam lithography," Journal of Vacuum Science & Technology B, vol. 26, pp. 2316-2321, Nov 2008. Full Text.

C. B. Samantaray and J. T. Hastings, "Self-assembled monolayer fiducial grids for spatial-phase-locked electron-beam lithography," Journal of Vacuum Science & Technology B, vol. 26, pp. 2351-2355, Nov 2008. Full Text.

P. D. Keathley and J. T. Hastings, "Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication," Journal of Vacuum Science & Technology B, vol. 26, pp. 2473-2477, Nov 2008. Full Text.

J. T. Hastings, "Spectral peak-shift estimation with wavelength dependent sources and detectors," IEEE Transactions on Signal Processing, vol. 56, pp. 5269-5272, Oct 2008. Full Text.

E.A. Hawes, J.T Hastings, C. Crofcheck and M.P. Mengüç, “Spatially Selective Melting and Evaporation of Single and Groups of Nanosized Gold Particles,” Optics Letters vol. 33, pp.1383-1385 (2008).

J. Guo, P. D. Keathley, J.T. Hastings, "Dual-mode surface-plasmon resonance sensors using angular interrogation," Optics Letters, vol. 33, pp. 512-514 (2008).

J. T. Hastings , "Optimizing Surface-Plasmon Resonance Sensors for Limit of Detection Based on a Cramer Rao Bound," IEEE Sensors Journal, vol. 8, pp. 170-175 (2008).

Y. Yang and J. T. Hastings, "Real-time Spatial Phase Locking for Vector-Scan Electron Beam Lithography," Journal of Vacuum Science & Technology B., vol. 25, pp. 2072-2076 (2007).

J. T. Hastings , J. Guo, P. D. Keathley, P. B. Kumaresh, Y. Wei, S. Law, and L. G. Bachas, "Optimal self-referenced sensing using long- and short- range surface plasmons," Optics Express, vol. 15, pp. 17661-17672 (2007).

Hawes, E.A., and J.T. Hastings, C. Crofcheck and M.P. Mengüç, “Spectrally selective heating of nanosized particles by surface plasmon resonance,” Journal of Quantitative Spectroscopy and Radiative Transfer, v. 104(2): 199-207 (2007).

J.T. Hastings , “Real-time determination of electron-beam probe shape using an in-situ fiducial grid,” Journal of Vacuum Science and Technology B, Vol. 24(6): pp. 2875-2880 (2006).

V. Krishnamurthy, R. V. Namepalli, and J. T. Hastings, “Sub-Pixel Alignment for Scanning-Beam Lithography Using One-Dimensional, Phase-Based Mark Detection,” Journal of Vacuum Science and Technology B, Vol. 23, pp. 3037-3042 (2005). Full Text Link

J.T. Hastings , F. Zhang, and H.I. Smith, “Nanometer-Level Stitching in Raster-Scanning E-beam Lithography Using Spatial-Phase Locking.” Journal of Vacuum Science and Technology B 21 (6): 2650-2656 (2003). Abstract. Full Text Link

J. T. Hastings , Michael H. Lim, J. G. Goodberlet, and Henry I. Smith . “Optical Waveguides with Apodized Sidewall Gratings via Spatial-Phase-Locked E-Beam Lithography.”Journal of Vacuum Science and Technology B 20(6), 2753-2757 (2002). Abstract. Full Text Link

T. E. Murphy, J. T. Hastings, and H. I. Smith, “Fabrication and Characterization of Narrow-Band Bragg-Reflection Filters in Silicon-on-Insulator Ridge Waveguides,” IEEE Journal of Lightwave Technology 19(12), 1938-1942 (2001). Abstract. Full Text Link

J. G. Goodberlet, J. T. Hastings, and Henry I. Smith,Performance of the Raith 150 Electron-Beam Lithography System,” Journal of Vacuum Science and Technology B 19(6), 2499-2503 (2001). Abstract. Full Text Link

J. T. Hastings , F. Zhang, M.A. Finlayson, J. G. Goodberlet, and Henry I. Smith, “Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling,” Journal of Vacuum Science and Technology B 18(6), 3268-3271 (2000). Abstract. Full Text Link

J. T. Hastings , F. Zhang, J. G. Goodberlet, and Henry I. Smith, “Improved Pattern-Placement Accuracy in E-Beam Lithography via Sparse-Sample Spatial-Phase Locking” Microelectronic Engineering 53(1-4), 361-364 (2000). Abstract.

Chris Leahy, J. T. Hastings, and P. M. Wilt, “Temperature-Dependence of Doppler-Broadening in Rubidium: An Undergraduate Experiment,” American Journal of Physics 65(5), 367-371 (1997). Abstract.

J. T. Hastings and K. W. Ng, “Characterization of a complementary metal-oxide semiconductor operational amplifier from 300 to 4.2K,” Review of Scientific Instruments 66(6), 3691-3696 (1995). Abstract. Full Text Link

 

Conference Abstracts:

V. d. Silva, A. Chamberlain, S. Kortikar, M. Yazdanpanah, R. Cohn, P. Huettl, F. Pomerleau, G. A. Gerhardt, and J. T. Hastings, "Nano-structured Microelectrode Arrays with Enhanced Sensitivity and Limit of Detection for in vivo Enzymatic Sensing," in Neuroscience, Washington D.C., 2005.

R. Donipudi, S. Pochiraju, and J. T. Hastings, "Self-Referenced SPR Sensing via Simultaneous Excitation of Long- and Short-Range Surface Plasmons," in the proceedings of the Conference on Lasers and Electrooptics(2006).

T.D. Coates, Jr., J.J Burmeister, J.T. Hastings, P. Huettl, S. Kortikar, F. Pomerleau, G.A. Gerhardt. “Nanostructured Microelectrode Arrays for Improved Spatial Resolution and Sensitivity for Rapid In Vivo Electrochemical Recordings.” presented at Neuroscience 2004, the Society for Neuroscience's 34th Annual Meeting, San Diego, California, October 23-27, 2004.

J. T. Hastings and H. I. Smith, "Apodized optical filters based on silicon-on-insulator waveguides with sidewall gratings," presented at the Conference on Lasers and Electro-Optics, San Francisco, CA, May 20, 2004.

J. T. Hastings, Mark L. Schattenburg, Paul Konkola, Euclid E. Moon, Feng Zhang, and Henry I. Smith, "Nanoaccuracy: an Essential Element of Nanotechnology," presented at the Japan-US Symposium on Tools and Metrology for NanoTechnology, January 22, 2003. Presentation. (PDF, 1.7MB) Proceedings. (PDF from Cornell)

J. T Hastings, "Integrated Optics and Nanometer-Precision Pattern Placement with E-beam Lithography," prensented at NANO2004 - 10th Workshop on SEM-based E-beam Lithography Germany, Dortmund, February 17, 2004.

"Nano-lithography beyond Silicon CMOS," J.T. Hastings, presented at the Kentucky Materials Nanotechnology Workshop, Louisville, KY, September 25, 2003.

D. Gil, R. Menon, J. T. Hastings, and H. I. Smith, "The Promise of Diffractive Optics in Maskless Lithography," in 28th International Conference on Micro- and Nano-Engineering, Cambridge, 2003.

Other Publications and Presentations:

J.T. Hastings, "Nanoscale Engineering for Optical Communications and Sensing:  Novel Devices and Enabling Fabrication Techniques," presented at the NSF-Germany Young Researchers Nanotechnology Workshop, March 14, 2005, Karlsruhe, Germany.

J.T. Hastings , “Nanotechnology,” INNOVATION Magazine, Educational Broadcasting Corporation (WNET, New York educational public television). p.12 (2004).

J.T. Hastings , Z. Chen, B.J. Hinds, V.P. Singh, “University of Kentucky Center for Nanoscale Science and Engineering ( CeNSE),” presented at the International Workshop on Nanomaterials, Lexington, KY, Sept. 20-21, 2004.

V. de Silva, A. Chamberlain, R. Donipudi, J.T. Hastings “Surface-Plasmon Waveguide Devices for Optical Communications,” presented at Posters-at-the-Capital 2005, Frankfort, KY, Feb. 3, 2005.

J. T. Hastings , “Nano-lithography beyond Silicon CMOS,” invited presentation at the Kentucky Materials Nanotechnology Workshop, Louisville, KY, September 25, 2003.

"Optical Waveguides with Apodized Sidewall Gratings via Direct-write Spatial-phase-locked E-beam Lithography" J. T. Hastings, M. H. Lim, J.G. Goodberlet, and H. I. Smith, presented at the MIT Microphotonics Center Seminar, October 3, 2002.

Theses:

"Nanometer-Precision Electron-Beam Lithography with Applications in Integrated Optics," J. Todd Hastings, Ph.D. Thesis, Massachusetts Institute of Technology, 2003. Full Text (from MIT).

"Performance Enhancements for High-Speed Gallium Arsenide Light-Emitting Diodes," J. Todd Hastings, M.S. Thesis, Purdue University, 1998.

"Selective Heating of nanoscale Materials Using Near-Field Radiative Transfer and Surface Plasmon Resonance," E. A. Hawes, Ph.D. Thesis, University of Kentucky 2007 (co-supervised by M. P. Menguc and C. Crofcheck).

"Finite Element Analysis and Experimental Verification of Losses in SOI Waveguides," H. Srinivasan, M.S. Thesis, University of Kentucky 2007.

"Nanostructured Sensors for In-vivo Neurochemical Recording," S. Nagari, M.S. Thesis, University of Kentucky 2007.

"Optimization of a Dual-mode Surface-Plasmon Resonance Sensor," P. Bathae Kumaresh, M.S. Thesis, University of Kentucky, 2006.

(Additional updates coming soon.)

Patents Awarded

J.T. Hastings , J.G. Goodberlet, F.Z. Zhang, and H.I. Smith, United States Patent 7417234, "Spatial-phase locking of one or more energy beams for determining two-dimensional location and beam shape," Issued August 26, 2008.

D. Gil, J.T. Hastings, J.G. Goodberlet, R. Menon, D.J. Carter; H.I. Smith, United States Patent 7348104, “System and method for fabrication and replication of diffractive optical elements for maskless lithography," Issued March 25, 2008.

Application Submitted or in Process

J.T. Hastings , M. H. Lim, and H. I. Smith, Utility Patent Application "Optical Waveguide with Side-Wall Gratings," Patent Cooperation Treaty Serial No. US03/16600, Filed May 28, 2003. United States of America Serial No. 10/446245, Filed May 30, 2002.