Equipment Request Forms

 

 

Tool status:

= Up

= Limited

= Down

 

You can check the equipment availability here

Annealing Furnace   Atomic Force Microscope   Atomic Force Microscope with Isolation Chamber
Atomic Layer Deposition   Cleanbench - Solvent (rm 369)   Cleanbench - Acid (rm 365)
Doping Furnace   E-Beam Evaporator   Electron Beam Lithography
General Furnace   Oxidation Furnace   Plasma Enhanced Chemical Vapor Deposition (PECVD)
Plasma Etch   Photolithography   Quartz Crystal Microbalance (QCM)
Rapid Thermal Processing (RTP)   Reactive Ion Etching (RIE)   Spectroscopic Ellipsometer
Small Sputtering System   Large Sputtering System   Thermal Evaporator (Edwards)
Thermal Evaporator 2            
               
               

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