CeNSE Center for Nanoscale Science and Engineering
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Date and Time
Instrument or Tool
Annealing Furnace
AFM
AFM w/Isolation Chamber
ALD
Cleanbench (solvent)
Doping Furnace
Ebeam Evaporator
Electron Beam Lithography
Ellipsometer
General Furnace
Large Supttering System
Oxidation Furnace
PECVD
Plasma Etcher
Photolithography
Optical Microscope
Other
QCM
RTP
Spectroscopic Ellipsometer
Small Supttering System
Thermal Evaporator (Bell Jar)
Thermal Evaporator (White)
4 point probe
If not Listed Please Specify
Notes