Large Sputtering System Request Form

 

 

Name    
Advisor    
Date and Time    
  You must also reserve on the calendar here or your request will not be approved.    
       
Gun 1 2 3 4 5    
Angle    
       
Material      
Target If other please specify
Thickness (nm) 200nm max    
       
Gases      
Gas 1 If other please specify
Flow Rate (sccm) 30max    
       
Gas 2 If other please specify
Flow Rate (sccm) 30max    
  Maximum combined flow rate is 30sccm    
       
Pressure (mT)    
       
Power      
RF power (watts) 250max    
DC Power (watts)    
       
Temperature (celcius) 300 max    
       
General      
Notes    
       

You may provide your own targets for specific depositions but they are contigent on CeNSE approval. Target size is 2"x.125".

Large sputtering operation instructions Doc PDF